A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases

Andreas Schröder; Mario Kupnik; Paul O'Leary; Ewald Benes; Martin Gröschl

doi:10.1109/JSEN.2006.877975

A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases

Andreas Schröder, Mario Kupnik, Paul O'Leary, Ewald Benes, Martin Gröschl

Lehrstuhl für Automation und Messtechnik (530)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

9 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	1661569
Seiten (von - bis)	898-905
Seitenumfang	8
Fachzeitschrift	IEEE sensors journal
Jahrgang	6
Ausgabenummer	4
DOIs	https://doi.org/10.1109/JSEN.2006.877975
Publikationsstatus	Veröffentlicht - 1 Aug. 2006

Zugriff auf Dokument

10.1109/JSEN.2006.877975

Andere Dateien und Links

Link to publication in Scopus

Dieses zitieren

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title = "A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases",

keywords = "Capacitance transducer, Exhaust gas, High-temperature ultrasonic transducer, Mass flowmeter, Pulsating gas flow, Ultrasonic flowmeter (UFM)",

author = "Andreas Schr{\"o}der and Mario Kupnik and Paul O'Leary and Ewald Benes and Martin Gr{\"o}schl",

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AU - Schröder, Andreas

AU - Kupnik, Mario

AU - O'Leary, Paul

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AU - Gröschl, Martin

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KW - Exhaust gas

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KW - Mass flowmeter

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