A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases

Titel in Übersetzung: A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases

Andreas Schröder, Mario Kupnik, Paul O'Leary, Ewald Benes, Martin Gröschl

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Titel in Übersetzung	A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases
Originalsprache	Englisch
Seiten (von - bis)	898-905
Fachzeitschrift	IEEE sensors journal
Jahrgang	VOL. 6
Publikationsstatus	Veröffentlicht - 2006

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@article{9b4d576fc1fa4b15bc5609133f7a2944,

title = "A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases",

author = "Andreas Schr{\"o}der and Mario Kupnik and Paul O'Leary and Ewald Benes and Martin Gr{\"o}schl",

year = "2006",

language = "English",

volume = "VOL. 6",

pages = "898--905",

journal = "IEEE sensors journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers",

}