A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets

A comparative study on NbO_x films reactively sputtered from sinterd and cold gas sprayed targets

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

5 Zitate (Scopus)

@article{07919c0efeb743e0817f2d22cb44c476,

title = "A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets",

author = "Roland Lorenz and M. O`Sullivan and Alexander Fian and D. Sprenger and Bernhard Lang and Christian Mitterer",

year = "2018",

doi = "10.1016/j.apsusc.2017.12.165",

language = "English",

pages = "1157--1162",

journal = "Applied surface science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets

AU - Lorenz, Roland

AU - O`Sullivan, M.

AU - Fian, Alexander

AU - Sprenger, D.

AU - Lang, Bernhard

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1016/j.apsusc.2017.12.165

DO - 10.1016/j.apsusc.2017.12.165

M3 - Article

SN - 0169-4332

SP - 1157

EP - 1162

JO - Applied surface science

JF - Applied surface science

ER -