Advanced Characterization of thermo-mechanical fatigue mechanisms for semiconductor metallizations

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2016
Veranstaltung	ICMCTF International Conference on Metal Coatings and Thin Films 2016 - San Diego, USA / Vereinigte Staaten Dauer: 25 Apr. 2016 → 29 Apr. 2016

Konferenz	ICMCTF International Conference on Metal Coatings and Thin Films 2016
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Diego
Zeitraum	25/04/16 → 29/04/16

Dieses zitieren

@conference{34903b5af5c64b43afeb2b051e0f869a,

title = "Advanced Characterization of thermo-mechanical fatigue mechanisms for semiconductor metallizations",

author = "Stephan Bigl and Stefan Wurster and Thomas Sch{\"o}berl and Megan Cordill and Daniel Kiener",

year = "2016",

language = "English",

note = "ICMCTF International Conference on Metal Coatings and Thin Films 2016 ; Conference date: 25-04-2016 Through 29-04-2016",

}

TY - CONF

T1 - Advanced Characterization of thermo-mechanical fatigue mechanisms for semiconductor metallizations

AU - Bigl, Stephan

AU - Wurster, Stefan

AU - Schöberl, Thomas

AU - Cordill, Megan

AU - Kiener, Daniel

PY - 2016

Y1 - 2016

M3 - Presentation

T2 - ICMCTF International Conference on Metal Coatings and Thin Films 2016

Y2 - 25 April 2016 through 29 April 2016

ER -