Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Felix Biegger; Felix Jungwirth; Michael Stanislaus Seifner; Christoph Rameshan; Sven Barth

doi:10.1007/s00706-017-1980-2

Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Felix Biegger, Felix Jungwirth, Michael Stanislaus Seifner, Christoph Rameshan, Sven Barth

Technische Universität Wien

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

4 Zitate (Scopus)

Abstract

Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [

Originalsprache	Englisch
Seiten (von - bis)	1385-1392
Seitenumfang	8
Fachzeitschrift	Monatshefte fur Chemie
Jahrgang	148.2017
Ausgabenummer	8
DOIs	https://doi.org/10.1007/s00706-017-1980-2
Publikationsstatus	Veröffentlicht - 2 Juni 2017
Extern publiziert	Ja

Bibliographische Notiz

Funding Information:
Open access funding provided by TU Wien (TUW). We thank the X-ray centre for access to the powder XRD machine and the University Service Centre for TEM (USTEM) for access to the electron microscopes at TU Wien. The TU Wien is acknowledged for financial support. We thank Thomas Haunold for acquiring some XPS spectra.

Publisher Copyright:
© 2017, The Author(s).

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10.1007/s00706-017-1980-2

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