Anisotropic wet-chemical etching for preparation of freestanding films on Si substrates for atom probe tomography: A simple yet effective approach

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

Abstract

A major drawback of atom probe tomography (APT) experiments of complex samples is the demanding and rather time consuming specimen preparation via the lift-out process. It usually requires a skilled operator for focused ion beam (FIB) preparation, and frequently overbooked FIB workstations represent a major bottleneck in sample throughput. Within this work, the authors present an alternative approach for APT specimen preparation of functional films and coatings on Si substrates via anisotropic wet-chemical etching. Utilizing this simple, yet effective approach, a freestanding section of the film to be investigated can be fabricated in a few steps. After the etching procedure, freestanding film posts and subsequently APT specimen can be easily prepared by basic FIB milling operations without the need for a lift-out process. Hence, this approach reduces FIB efforts to a minimum in terms of complexity and required machine utilization.

OriginalspracheEnglisch
Aufsatznummer113402
Seiten (von - bis)1-4
FachzeitschriftUltramicroscopy
Jahrgang230
Ausgabenummer113402
DOIs
PublikationsstatusVeröffentlicht - Nov. 2021

Bibliographische Notiz

Funding Information:
The authors gratefully acknowledge the financial support under the scope of the COMET program within the K2 Center “ Integrated Computational Material, Process and Product Engineering (IC-MPPE)” (Project No 859480 ). This program is supported by the Austrian Federal Ministries for Climate Action, Environment, Energy, Mobility, Innovation and Technology (BMK) and for Digital and Economic Affairs (BMDW), represented by the Austrian research funding association (FFG), and the federal states of Styria, Upper Austria and Tyrol.

Funding Information:
The authors gratefully acknowledge the financial support under the scope of the COMET program within the K2 Center ?Integrated Computational Material, Process and Product Engineering (IC-MPPE)? (Project No 859480). This program is supported by the Austrian Federal Ministries for Climate Action, Environment, Energy, Mobility, Innovation and Technology (BMK) and for Digital and Economic Affairs (BMDW), represented by the Austrian research funding association (FFG), and the federal states of Styria, Upper Austria and Tyrol.

Publisher Copyright:
© 2021 The Author(s)

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