@article{19cd291a875b4d4dadf20d8c757a181d,
title = "Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers",
author = "Andreas Kleinbichler and Juraj Todt and Johannes Zechner and Stefan W{\"o}hlert and Daniel T{\"o}bbens and Megan Cordill",
year = "2017",
month = sep,
day = "18",
doi = "10.1016/j.surfcoat.2017.07.087",
language = "English",
volume = "332.2017",
pages = "376--381",
journal = "Surface \& coatings technology",
issn = "0257-8972",
publisher = "Elsevier B.V.",
number = "25 December",
}