Buckle induced delamination techniques to measure the adhesion of metal dielectric interfaces

Andreas Kleinbichler, J. Zechner, Megan Cordill

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

17 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	63-68
Seitenumfang	6
Fachzeitschrift	Microelectronic engineering
Jahrgang	167.2017
Ausgabenummer	5 January
Publikationsstatus	Elektronische Veröffentlichung vor Drucklegung. - 2 Nov. 2016

Dieses zitieren

@article{c50d23c1fc99469086876211a14e65e6,

title = "Buckle induced delamination techniques to measure the adhesion of metal dielectric interfaces",

author = "Andreas Kleinbichler and J. Zechner and Megan Cordill",

year = "2016",

month = nov,

day = "2",

language = "English",

volume = "167.2017",

pages = "63--68",

journal = "Microelectronic engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "5 January",

}