C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

Titel in Übersetzung: C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

4 Zitate (Scopus)

Titel in Übersetzung	C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings
Originalsprache	Englisch
Seiten (von - bis)	127-132
Fachzeitschrift	Surface & coatings technology
Jahrgang	215
DOIs	https://doi.org/10.1016/j.surfcoat.2012.08.081
Publikationsstatus	Veröffentlicht - 2013

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@article{ae32550078d948e880f337130e51c0d7,

title = "C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings",

author = "Christoph Czettl and Christian Mitterer and M Penoy and C. Michotte and M. Kathrein",

year = "2013",

doi = "10.1016/j.surfcoat.2012.08.081",

language = "English",

volume = "215",

pages = "127--132",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

AU - Czettl, Christoph

AU - Mitterer, Christian

AU - Penoy, M

AU - Michotte, C.

AU - Kathrein, M.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.surfcoat.2012.08.081

DO - 10.1016/j.surfcoat.2012.08.081

M3 - Article

SN - 0257-8972

VL - 215

SP - 127

EP - 132

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -