Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

Publikation: Konferenzbeitrag › Poster › Forschung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 14 Sept. 2016
Veranstaltung	15th International Conference on Plasma Surface Engineering - Kongresshaus, Garmisch-Partenkirchen, Deutschland Dauer: 12 Sept. 2016 → 16 Sept. 2016

Konferenz	15th International Conference on Plasma Surface Engineering
Kurztitel	PSE 2016
Land/Gebiet	Deutschland
Ort	Garmisch-Partenkirchen
Zeitraum	12/09/16 → 16/09/16

15th International Conference on Plasma Surface Engineering
Christian Saringer (Teilnehmer/-in)
11 Sept. 2016 → 16 Sept. 2016
Aktivität: Teilnahme an oder Organisation einer Veranstaltung › Konferenzteilnahme

Dieses zitieren

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title = "Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power",

author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",

year = "2016",

month = sep,

day = "14",

language = "English",

note = "15th International Conference on Plasma Surface Engineering ; Conference date: 12-09-2016 Through 16-09-2016",

}

TY - CONF

T1 - Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

AU - Saringer, Christian

AU - Franz, Robert

AU - Zorn, Katrin

AU - Mitterer, Christian

PY - 2016/9/14

Y1 - 2016/9/14

M3 - Poster

T2 - 15th International Conference on Plasma Surface Engineering

Y2 - 12 September 2016 through 16 September 2016

ER -