@article{c95ea5d22b1241fba346e985247def40,
title = "Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and \{Mendez Martin\}, Francisca and B. Sartory and Nina Schalk and Jozef Keckes and J. Lu and L. Hultman and Christian Mitterer",
year = "2015",
doi = "10.1016/j.tsf2014.11.084",
language = "English",
volume = "574",
pages = "103--109",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}