Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films

Thomas Glechner, S. Lang, R. Hahn, Markus Alfreider, Vincent Moraes, Daniel Primetzhofer, Jürgen Ramm, S. Kolozsvári, Daniel Kiener, Helmut Riedl

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

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