Data based modelling and identification of nonlinear SDOF MOEMS mirror

David Brunner; Han Woong Yoo; Thomas Thurner; Georg Schitter

doi:10.1117/12.2508429

Data based modelling and identification of nonlinear SDOF MOEMS mirror

David Brunner
, Han Woong Yoo
, Thomas Thurner
, Georg Schitter

Infineon Technologies Austria AG, Graz
Technische Universität Wien

Publikation: Konferenzbeitrag › Paper › Begutachtung

Originalsprache	Englisch
DOIs	https://doi.org/10.1117/12.2508429
Publikationsstatus	Veröffentlicht - 2019
Extern publiziert	Ja
Veranstaltung	MOEMS and Miniaturized Systems XVIII 2019 - San Francisco, USA / Vereinigte Staaten Dauer: 2 Feb. 2019 → 4 Feb. 2019

Konferenz

Konferenz	MOEMS and Miniaturized Systems XVIII 2019
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Francisco
Zeitraum	2/02/19 → 4/02/19

Bibliographische Notiz

Publisher Copyright:
© 2019 SPIE.

Zugriff auf Dokument

10.1117/12.2508429

Andere Dateien und Links

Verknüpfung zur Publikation in Scopus

Dieses zitieren

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title = "Data based modelling and identification of nonlinear SDOF MOEMS mirror",

keywords = "Actuated decay, Comb-drive torque, Data based identification, Generalized nonlinear SDOF model, Micro-Opto-Electro-Mechanical System (MOEMS), Resonant scanning mirror",

author = "David Brunner and Yoo, \{Han Woong\} and Thomas Thurner and Georg Schitter",

note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; MOEMS and Miniaturized Systems XVIII 2019 ; Conference date: 02-02-2019 Through 04-02-2019",

year = "2019",

doi = "10.1117/12.2508429",

language = "English",

}

TY - CONF

T1 - Data based modelling and identification of nonlinear SDOF MOEMS mirror

AU - Brunner, David

AU - Yoo, Han Woong

AU - Thurner, Thomas

AU - Schitter, Georg

PY - 2019

Y1 - 2019

KW - Actuated decay

KW - Comb-drive torque

KW - Data based identification

KW - Generalized nonlinear SDOF model

KW - Micro-Opto-Electro-Mechanical System (MOEMS)

KW - Resonant scanning mirror

UR - https://www.scopus.com/pages/publications/85068070473

U2 - 10.1117/12.2508429

DO - 10.1117/12.2508429

M3 - Paper

AN - SCOPUS:85068070473

T2 - MOEMS and Miniaturized Systems XVIII 2019

Y2 - 2 February 2019 through 4 February 2019

ER -