Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

Markus Nuspl; J. Angeli; W. Posch; Wolfhard Wegscheider

Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

Titel in Übersetzung: Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

Markus Nuspl
, J. Angeli
, W. Posch
, Wolfhard Wegscheider

Lehrstuhl für Allgemeine und Analytische Chemie (120)

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

Titel in Übersetzung	Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database
Originalsprache	Englisch
Titel	Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database
Seiten	1-11
Publikationsstatus	Veröffentlicht - 2004

Dieses zitieren

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title = "Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database",

author = "Markus Nuspl and J. Angeli and W. Posch and Wolfhard Wegscheider",

year = "2004",

language = "English",

pages = "1--11",

booktitle = "Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database",

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Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database. / Nuspl, Markus; Angeli, J.; Posch, W. et al.
Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database. 2004. S. 1-11.

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

TY - GEN

T1 - Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

AU - Nuspl, Markus

AU - Angeli, J.

AU - Posch, W.

AU - Wegscheider, Wolfhard

PY - 2004

Y1 - 2004

M3 - Conference contribution

SP - 1

EP - 11

BT - Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

ER -