Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Manuel Gruber; Alexander Leitner; Daniel Kiener; Peter Supancic; Raul Bermejo

doi:https://doi.org/10.1016/j.matdes.2021.110306

Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Manuel Gruber, Alexander Leitner, Daniel Kiener, Peter Supancic, Raul Bermejo

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

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Originalsprache	Englisch
Aufsatznummer	110306
Fachzeitschrift	Materials and Design
Jahrgang	213
DOIs	https://doi.org/10.1016/j.matdes.2021.110306 https://doi.org/10.1016/j.matdes.2021.110306
Publikationsstatus	Veröffentlicht - 2022

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© 2021 The Authors

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Dieser Output leistet einen Beitrag zu folgendem(n) Ziel(en) für nachhaltige Entwicklung

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M. Gruber, A. Leitner, D. Kiener, S. Supancic, R. Bermejo 2022 (Mater Design 213,110306)Endgültige, publizierte Fassung, 2,18 MBLizenz: CC BY-NC-ND

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M. Gruber, A. Leitner, D. Kiener, S. Supancic, R. Bermejo 2022 (Mater Design 213,110306)

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title = "Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications",

keywords = "Biaxial strength, Brittle single crystals, Hardness anisotropy, Reliability of microelectronic materials, Scratch testing, Strength anisotropy",

author = "Manuel Gruber and Alexander Leitner and Daniel Kiener and Peter Supancic and Raul Bermejo",

note = "Publisher Copyright: {\textcopyright} 2021 The Authors",

year = "2022",

doi = "https://doi.org/10.1016/j.matdes.2021.110306",

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T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

AU - Gruber, Manuel

AU - Leitner, Alexander

AU - Kiener, Daniel

AU - Supancic, Peter

AU - Bermejo, Raul

PY - 2022

Y1 - 2022

KW - Biaxial strength

KW - Brittle single crystals

KW - Hardness anisotropy

KW - Reliability of microelectronic materials

KW - Scratch testing

KW - Strength anisotropy

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DO - https://doi.org/10.1016/j.matdes.2021.110306

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AN - SCOPUS:85120697868

SN - 0264-1275

VL - 213

JO - Materials and Design

JF - Materials and Design

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