Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

10 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	041517
Seitenumfang	8
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Jahrgang	34.2016
Ausgabenummer	4
DOIs	https://doi.org/10.1116/1.4954949
Publikationsstatus	Veröffentlicht - 1 Juli 2016

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