@article{efe8d011d39f48a0a82ba94e3c7c7da2,
title = "Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2016",
month = jul,
day = "1",
doi = "10.1116/1.4954949",
language = "English",
volume = "34.2016",
journal = "Journal of vacuum science \& technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}