@article{4d888197264c4fe899b2576e0c8a95a3,
title = "Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers",
author = "Imane Souli and Velislava Terziyska and Jozef Keckes and Werner Robl and Johannes Zechner and Christian Mitterer",
year = "2017",
month = feb,
day = "9",
doi = "10.1116/1.4975805",
language = "English",
volume = "35.2017",
journal = "Journal of vacuum science \& technology / B (JVST)",
issn = "1071-1023",
publisher = "American Institute of Physics",
number = "2",
}