Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

Titel in Übersetzung: Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Titel in Übersetzung	Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
Originalsprache	Englisch
Seiten (von - bis)	0415061-0415068
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Publikationsstatus	Veröffentlicht - 2011

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@article{b0f3fe8e259348a5b391b704e804dc77,

title = "Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings",

author = "Viktoria Edlmayr and T.P. Harzer and R. Hoffmann and Daniel Kiener and C. Scheu and Christian Mitterer",

year = "2011",

language = "English",

pages = "0415061--0415068",

journal = "Journal of vacuum science \& technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

AU - Edlmayr, Viktoria

AU - Harzer, T.P.

AU - Hoffmann, R.

AU - Kiener, Daniel

AU - Scheu, C.

AU - Mitterer, Christian

PY - 2011

Y1 - 2011

M3 - Article

SN - 0734-2101

SP - 415061

EP - 415068

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

ER -