@article{0aad72cbc20348a2b285479a726b433f,
title = "Enhancement of copper nanoparticle yield in magnetron sputter inert gas condensation by applying substrate bias voltage and its influence on thin film morphology",
keywords = "Low energy ion scattering spectroscopy, Magnetron sputter inert gas condensation, Magnetron sputtering, Nanoparticle synthesis, Thin film",
author = "Florian Knabl and Dominik Gutnik and Prathamesh Patil and Christine Bandl and Tijmen Vermeij and Pichler, \{Christian M.\} and Barbara Putz and Christian Mitterer",
note = "Publisher Copyright: {\textcopyright} 2024 The Authors",
year = "2024",
month = dec,
doi = "10.1016/j.vacuum.2024.113724",
language = "English",
volume = "230",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",
}