@article{bded4a93c6844f5db9efd98191d05d32,
title = "Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target",
author = "J{\"o}rg Neidhardt and S. Mraz and J.M. Schneider and E. Strub and W. Bohne and B. Liedke and W. M{\"o}ller and Christian Mitterer",
year = "2008",
doi = "10.1063/1.2978211",
language = "English",
volume = "104",
pages = "063304--1--063304--10",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
}