Fast Cross-Linking-Characterization of Waveguide-Polymers on Wafers by Imaging Low-Coherence Interferometry

University of Applied Sciences Zwickau
Technische Universität Dresden
Fraunhofer-Anwendungszentrum für Optische Messtechnik und Oberflächentechnologien (AZOM)
Polymer Competence Center Leoben GmbH

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

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@article{525492d7d84546f584a7bdc1cbf8f472,

title = "Fast Cross-Linking-Characterization of Waveguide-Polymers on Wafers by Imaging Low-Coherence Interferometry",

author = "Christopher Taudt and Bryan Nelsen and Sandra Schl{\"o}gl and Edmund Koch and Peter Hartmann",

year = "2019",

doi = "10.3390/proceedings2131046",

language = "English",

volume = "2.2018",

journal = "Proceedings / MDPI AG ",

issn = "2504-3900",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "13",

}

TY - JOUR

T1 - Fast Cross-Linking-Characterization of Waveguide-Polymers on Wafers by Imaging Low-Coherence Interferometry

AU - Taudt, Christopher

AU - Nelsen, Bryan

AU - Schlögl, Sandra

AU - Koch, Edmund

AU - Hartmann, Peter

PY - 2019

Y1 - 2019

U2 - 10.3390/proceedings2131046

DO - 10.3390/proceedings2131046

M3 - Article

SN - 2504-3900

VL - 2.2018

JO - Proceedings / MDPI AG

JF - Proceedings / MDPI AG

IS - 13

M1 - 1046

ER -