Functional thin films for display and microelectronics applications

Christian Mitterer; Tanja Jörg; Robert Franz; Marlene Mühlbacher; B. Sartory; Francisca Mendez Martin; Nina Schalk

doi:10.1007/s00501-015-0354-5

Functional thin films for display and microelectronics applications

Christian Mitterer
, Tanja Jörg
, Robert Franz
, Marlene Mühlbacher
, B. Sartory
, Francisca Mendez Martin
, Nina Schalk

Materials Center Leoben Forschungs GmbH

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung

Abstract

Within the last three decades, thin films grown by physical vapor deposition methods have found widespread applications. This article reports about recent research examples on molybdenum thin films, as used for thin film transistor liquid crystal displays, and on TiN diffusion barrier films, as used for microelectronics.

Originalsprache	Englisch
Seiten (von - bis)	231-234
Seitenumfang	4
Fachzeitschrift	Berg- und hüttenmännische Monatshefte : BHM
Jahrgang	2015
Ausgabenummer	Volume 160, Issue 5
DOIs	https://doi.org/10.1007/s00501-015-0354-5
Publikationsstatus	Veröffentlicht - 2015

Zugriff auf Dokument

10.1007/s00501-015-0354-5

Dieses zitieren

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