High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

M. Jilek, Jr.; M. Jilek,; Francisca Mendez Martin; P.H. Mayrhofer; S. Veprek

doi:10.1016/j.tsf.2014.01.059

High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Titel in Übersetzung: High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

M. Jilek, Jr.
, M. Jilek,
, Francisca Mendez Martin
, P.H. Mayrhofer
, S. Veprek

Lehrstuhl für Metallkunde (420)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

17 Zitate (Scopus)

Titel in Übersetzung	High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Originalsprache	Englisch
Seiten (von - bis)	361-368
Fachzeitschrift	Thin solid films
Jahrgang	556
DOIs	https://doi.org/10.1016/j.tsf.2014.01.059
Publikationsstatus	Veröffentlicht - 2014

Zugriff auf Dokument

10.1016/j.tsf.2014.01.059

Dieses zitieren

@article{3a16781bfa1747faaceeec9b48369ae1,

title = "High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering",

author = "\{Jilek, Jr.\}, M. and M. Jilek, and \{Mendez Martin\}, Francisca and P.H. Mayrhofer and S. Veprek",

year = "2014",

doi = "10.1016/j.tsf.2014.01.059",

language = "English",

volume = "556",

pages = "361--368",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

AU - Jilek, Jr., M.

AU - Jilek,, M.

AU - Mendez Martin, Francisca

AU - Mayrhofer, P.H.

AU - Veprek, S.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.01.059

DO - 10.1016/j.tsf.2014.01.059

M3 - Article

SN - 0040-6090

VL - 556

SP - 361

EP - 368

JO - Thin solid films

JF - Thin solid films

ER -