@article{7164e1adfa204f67b0e84122ad9a4a6e,
title = "Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism",
author = "Gregor Hlawacek and Vasilisa Veligura and Stefan Lorbek and Mocking, \{Tijs F.\} and Antony George and \{van Gastel\}, Raoul and Zandvliet, \{Harold J. W.\} and Bene Poelsema",
year = "2012",
doi = "10.3762\%2Fbjnano.3.58",
language = "English",
volume = "3",
pages = "507--512",
journal = "Beilstein journal of nanotechnology ",
issn = "2190-4286",
publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",
}