Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

Titel in Übersetzung: Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

Thomas Weirather, Stephan Grasser, Christoph Czettl, P. Polcik, M. Kathrein, Christian Mitterer

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Titel in Übersetzung	Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets
Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2013
Veranstaltung	18th Plansee Seminar - Reutte, Österreich Dauer: 3 Juni 2013 → 7 Juni 2013

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title = "Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets",

author = "Thomas Weirather and Stephan Grasser and Christoph Czettl and P. Polcik and M. Kathrein and Christian Mitterer",

year = "2013",

language = "English",

note = "18th Plansee Seminar ; Conference date: 03-06-2013 Through 07-06-2013",

}

TY - CONF

T1 - Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

AU - Weirather, Thomas

AU - Grasser, Stephan

AU - Czettl, Christoph

AU - Polcik, P.

AU - Kathrein, M.

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Poster

T2 - 18th Plansee Seminar

Y2 - 3 June 2013 through 7 June 2013

ER -