Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer; Aitana Tarazaga Martin-Luengo; Robert Franz; Enrico Franzke; Harald Köstenbauer; Jörg Winkler; Alberta Bonanni; Christian Mitterer

doi:10.1116/1.4973214

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

11 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	021504
Seitenumfang	8
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Jahrgang	35.2017
Ausgabenummer	2
DOIs	https://doi.org/10.1116/1.4973214
Publikationsstatus	Veröffentlicht - 4 Jan. 2017

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10.1116/1.4973214

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