Influence of Annealing Treatments on the Adhesion Metal Barrier Layers

Andreas Kleinbichler, J. Zechner, Megan Cordill

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2016
Veranstaltung	Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016 - Lewiston, USA / Vereinigte Staaten Dauer: 24 Juli 2016 → 29 Juli 2016

Konferenz	Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016
Land/Gebiet	USA / Vereinigte Staaten
Ort	Lewiston
Zeitraum	24/07/16 → 29/07/16

Dieses zitieren

@conference{a20a3ec4d08f468e87b8aedffc46de61,

title = "Influence of Annealing Treatments on the Adhesion Metal Barrier Layers",

author = "Andreas Kleinbichler and J. Zechner and Megan Cordill",

year = "2016",

language = "English",

note = "Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016 ; Conference date: 24-07-2016 Through 29-07-2016",

}