Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Siegfried Zöhrer; André Anders; Robert Franz

doi:10.1088/1361-6463/aaeecc

Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Siegfried Zöhrer
, André Anders
, Robert Franz

Lehrstuhl für Funktionale Werkstoffe und Werkstoffsysteme (425)

Lawrence Berkeley National Laboratory
Leibniz-Institut für Oberflächenmodifizierung

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

3 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	0552011-05520114
Fachzeitschrift	Journal of physics / D, Applied physics
DOIs	https://doi.org/10.1088/1361-6463/aaeecc
Publikationsstatus	Veröffentlicht - 2018

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10.1088/1361-6463/aaeeccLizenz: CC BY

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title = "Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution",

author = "Siegfried Z{\"o}hrer and Andr{\'e} Anders and Robert Franz",

year = "2018",

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journal = "Journal of physics / D, Applied physics",

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AU - Zöhrer, Siegfried

AU - Anders, André

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1088/1361-6463/aaeecc

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JO - Journal of physics / D, Applied physics

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