Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films

Titel in Übersetzung: Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

26 Zitate (Scopus)

Titel in Übersetzung	Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films
Originalsprache	Englisch
Seiten (von - bis)	148-155
Fachzeitschrift	Surface & coatings technology
Jahrgang	203
Publikationsstatus	Veröffentlicht - 2008

Dieses zitieren

@article{0ecf1d361d31490ca226acca5daa7e17,

title = "Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films",

author = "Martin Moser and Mayrhofer, \{Paul Heinz\} and L Sz{\'e}kely and G S{\'a}fr{\'a}n and P.B. Barna",

year = "2008",

language = "English",

volume = "203",

pages = "148--155",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films

AU - Moser, Martin

AU - Mayrhofer, Paul Heinz

AU - Székely, L

AU - Sáfrán, G

AU - Barna, P.B.

PY - 2008

Y1 - 2008

M3 - Article

SN - 0257-8972

VL - 203

SP - 148

EP - 155

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -