Influence of Dopants in Oxide-based Coatings Deposited by Thermal CVD

Manfred Schlögl

Influence of Dopants in Oxide-based Coatings Deposited by Thermal CVD

Titel in Übersetzung: Einfluss von Dotierungselementen auf Oxidschichten abgeschieden mit thermischer CVD

Manfred Schlögl

Lehrstuhl für Metallkunde (420)

Publikation: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Diplomarbeit › Begutachtung

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Abstract

Die Beschichtung mit Hartstoffen durch chemische Gasphasenabscheidung (CVD) ist eine Möglichkeit zur Steigerung der Leistungsfähigkeit von Hartmetallschneidwerkzeugen, wobei Al2O3 Schichten in vielen Anwendungsfällen Vorteile zeigen. Um verbesserte Schichteigenschaften zu erzielen bzw. chemische und anlagentechnische Grenzen aufzuzeigen, wurde im Rahmen dieser Diplomarbeit der Einfluss von sieben verschiedenen Dotierungselementen auf Al2O3 CVD-Schichten untersucht. Die Abscheideexperimente wurden in einem vertikalen Rohrreaktor, mit variierter HCl/Ar/N2/H2/CO2 Atmosphäre, sowie unter Zusatz von CH4 und NH3 zwischen 450 °C und 1000 °C durchgeführt. Als Substratmaterial dienten drei unterschiedlich vorbeschichtete Hartmetalle sowie Molybdän. Die Experimente wurden mittels gravimetrischer Messungen, Röntgendiffraktometrie (XRD), optischer Glimmentladungsspektroskopie (GDOES), Rasterelektronenmikroskopie (SEM), energiedispersive Röntgenspektroskopie (EDX) und Härtemessungen (Nanoindentor) charakterisiert. Die Dotierungselemente konnten bis zu einer Konzentration von 20 at.% in der abgeschiedenen Schicht detektiert werden, wobei Auswirkungen auf Oberflächenmorphologie, Kristallstruktur, Härte und Textur festgestellt werden konnte.

Titel in Übersetzung	Einfluss von Dotierungselementen auf Oxidschichten abgeschieden mit thermischer CVD
Originalsprache	Englisch
Qualifikation	Dipl.-Ing.
Gradverleihende Hochschule	Montanuniversität
Betreuer/-in / Berater/-in	Kathrein, Martin, Betreuer (extern), Externe Person Mitterer, Christian, Betreuer (intern) Hochauer, David, Mitbetreuer (intern) Martinz, Hans-Peter, Mitbetreuer (extern), Externe Person
Datum der Bewilligung	18 Dez. 2009
Publikationsstatus	Veröffentlicht - 2009

Bibliographische Notiz

gesperrt bis null

Schlagwörter

CVD Al2O3 Oxid Beschichtung Schicht Schneidwerkzeug dotieren Verschleiß

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abstract = "The deposition of hard coatings with chemical vapor deposition (CVD) is a way to improve the performance of cemented carbide cutting tools, where Al2O3 coatings show advantages in many applications. Further improvements of the coating properties can be achieved by doping of Al2O3. Hence, within this thesis the influence of seven different doping elements in Al2O3 coatings was investigated. The coating experiments were conducted in a vertical hot wall reactor between 450 °C and 1000 °C. The HCl/Ar/N2/H2/CO2 deposition atmosphere was also varied and the addition of CH4 and NH3 was investigated. Cemented carbide with three different precoatings and molybdenum were used as substrate material. Gravimetric analyzes, X-ray diffraction (XRD), glow discharge optical emission spectroscopy (GDOES), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and hardness measurements (nanoindentor) were used for coating characterization. The dopants were incorporated up to 20 at.\% in the coating and influenced coating morphology, crystal structure, hardness and texture.",

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N2 - The deposition of hard coatings with chemical vapor deposition (CVD) is a way to improve the performance of cemented carbide cutting tools, where Al2O3 coatings show advantages in many applications. Further improvements of the coating properties can be achieved by doping of Al2O3. Hence, within this thesis the influence of seven different doping elements in Al2O3 coatings was investigated. The coating experiments were conducted in a vertical hot wall reactor between 450 °C and 1000 °C. The HCl/Ar/N2/H2/CO2 deposition atmosphere was also varied and the addition of CH4 and NH3 was investigated. Cemented carbide with three different precoatings and molybdenum were used as substrate material. Gravimetric analyzes, X-ray diffraction (XRD), glow discharge optical emission spectroscopy (GDOES), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and hardness measurements (nanoindentor) were used for coating characterization. The dopants were incorporated up to 20 at.% in the coating and influenced coating morphology, crystal structure, hardness and texture.

AB - The deposition of hard coatings with chemical vapor deposition (CVD) is a way to improve the performance of cemented carbide cutting tools, where Al2O3 coatings show advantages in many applications. Further improvements of the coating properties can be achieved by doping of Al2O3. Hence, within this thesis the influence of seven different doping elements in Al2O3 coatings was investigated. The coating experiments were conducted in a vertical hot wall reactor between 450 °C and 1000 °C. The HCl/Ar/N2/H2/CO2 deposition atmosphere was also varied and the addition of CH4 and NH3 was investigated. Cemented carbide with three different precoatings and molybdenum were used as substrate material. Gravimetric analyzes, X-ray diffraction (XRD), glow discharge optical emission spectroscopy (GDOES), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and hardness measurements (nanoindentor) were used for coating characterization. The dopants were incorporated up to 20 at.% in the coating and influenced coating morphology, crystal structure, hardness and texture.

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KW - CVD Al2O3 oxide deposition coating cutting tools doping wear

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