Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD

Titel in Übersetzung: Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

4 Zitate (Scopus)

Titel in Übersetzung	Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD
Originalsprache	Englisch
Seiten (von - bis)	360-363
Fachzeitschrift	Surface & coatings technology
Jahrgang	200
DOIs	https://doi.org/10.1016/j.surfcoat.2005.02.069
Publikationsstatus	Veröffentlicht - 2005

Zugriff auf Dokument

@article{446adc06b0f247859ba31cd8f0ef1000,

title = "Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD",

author = "M. Fink and J. Laimer and H. St{\"o}ri and Christian Mitterer",

year = "2005",

doi = "10.1016/j.surfcoat.2005.02.069",

language = "English",

volume = "200",

pages = "360--363",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD

AU - Fink, M.

AU - Laimer, J.

AU - Störi, H.

AU - Mitterer, Christian

PY - 2005

Y1 - 2005

U2 - 10.1016/j.surfcoat.2005.02.069

DO - 10.1016/j.surfcoat.2005.02.069

M3 - Article

SN - 0257-8972

VL - 200

SP - 360

EP - 363

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -