Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

Marlene Mühlbacher, Francisca Mendez Martin, B. Sartory, J. Lu, Nina Schalk, Hultman Lars, Christian Mitterer

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2014
Veranstaltung	Functional Integrated nano Systems - nanoFIS 2014 - Graz, Österreich Dauer: 3 Dez. 2014 → 5 Dez. 2014

Konferenz	Functional Integrated nano Systems - nanoFIS 2014
Land/Gebiet	Österreich
Ort	Graz
Zeitraum	3/12/14 → 5/12/14

3rd International Conference nanoFIS - Integrated Functional nano Systems
Mühlbacher, M. (Redner/-in)
3 Dez. 2014
Aktivität: Teilnahme an oder Organisation einer Veranstaltung › Konferenzteilnahme

Dieses zitieren

@conference{5d2d6934336148f085f623597d31950c,

title = "Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and J. Lu and Nina Schalk and Hultman Lars and Christian Mitterer",

year = "2014",

language = "English",

note = "nanoFIS Konferenz ; Conference date: 03-12-2014 Through 05-12-2014",

}