Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Stephan Grasser; Gert Gassner; Claudia Walter; Rostislav Daniel; Christian Mitterer

Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Titel in Übersetzung: Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Stephan Grasser, Gert Gassner, Claudia Walter, Rostislav Daniel, Christian Mitterer

Lehrstuhl für Metallkunde (420)

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Titel in Übersetzung	Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering
Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2006
Veranstaltung	Junior Euromat 2006 - Lausanne, Schweiz Dauer: 4 Sept. 2006 → 8 Sept. 2006

Konferenz

Konferenz	Junior Euromat 2006
Land/Gebiet	Schweiz
Ort	Lausanne
Zeitraum	4/09/06 → 8/09/06

Dieses zitieren

@conference{2f0a7090bcfc4d519fb5cf7a90f603e1,

title = "Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering",

author = "Stephan Grasser and Gert Gassner and Claudia Walter and Rostislav Daniel and Christian Mitterer",

year = "2006",

language = "English",

note = "Juniior Euromat 2006 ; Conference date: 04-09-2006 Through 08-09-2006",

}