Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Stephan Grasser; Gert Gassner; Claudia Walter; Rostislav Daniel; Christian Mitterer

Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Titel in Übersetzung: Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Stephan Grasser
, Gert Gassner
, Claudia Walter
, Rostislav Daniel
, Christian Mitterer

Lehrstuhl für Metallkunde (420)

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Titel in Übersetzung	Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering
Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2006
Veranstaltung	Junior Euromat 2006 - Lausanne, Schweiz Dauer: 4 Sept. 2006 → 8 Sept. 2006

Konferenz

Konferenz	Junior Euromat 2006
Land/Gebiet	Schweiz
Ort	Lausanne
Zeitraum	4/09/06 → 8/09/06

Dieses zitieren

@conference{2f0a7090bcfc4d519fb5cf7a90f603e1,

title = "Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering",

author = "Stephan Grasser and Gert Gassner and Claudia Walter and Rostislav Daniel and Christian Mitterer",

year = "2006",

language = "English",

note = "Juniior Euromat 2006 ; Conference date: 04-09-2006 Through 08-09-2006",

}