Influence of the aspect ratio of the micro-cantilever on the determined Young’s modulus using the Euler-Bernoulli equation

Fabian Konstantiniuk, Martin Krobath, Werner Ecker, Christoph Czettl, Nina Schalk, Michael Tkadletz

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung


Micro-cantilever bending experiments can be used to determine fundamental material properties, such as fracture stress and fracture toughness. Furthermore, the Young's modulus can be calculated from the slope of the load-displacement curve using the classical Euler-Bernoulli equation. However, in literature it can be frequently found that applying this technique, the Young's modulus is significantly underestimated, especially when using micro-cantilevers with aspect ratios (bending length/width) < 6. In order to investigate the influence of the aspect ratio on the determination of the Young's modulus, SiO 2 and single crystalline α-Al 2O 3 micro-cantilevers with aspect ratios ranging from ∼ 3.5–6.5 were fabricated using focused ion beam milling and tested with a nanoindenter system. In addition to the quasi-static tests, dynamic micro-cantilever bending tests were performed by using an excitation frequency on top of a quasi-static loading and the results of both techniques were compared to each other. Finally, finite element analysis was used to simulate the static-micro-cantilever bending experiments and investigate the influence of shear deformation, flexing of the support and the geometry of the micro-cantilever on the load-displacement curves.

FachzeitschriftMaterials Today Communications
Frühes Online-Datum16 Mai 2023
PublikationsstatusVeröffentlicht - Juni 2023

Bibliographische Notiz

Funding Information:
The authors gratefully acknowledge the financial support under the scope of the COMET program within the K2 Center “Integrated Computational Material, Process and Product Engineering ( IC-MPPE )” (Project 886385 ). This program is supported by the Austrian Federal Ministries for Climate Action, Environment, Energy, Mobility, Innovation and Technology (BMK) and for Digital and Economic Affairs (BMDW), represented by the Austrian Research Funding Association (FFG), and the federal states of Styria, Upper Austria and Tyrol.

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© 2023

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