Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN

Christian Saringer, Michael Tkadletz, Josef Thurner, Christoph Czettl, Nina Schalk

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung


Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.

FachzeitschriftMaterials letters
Ausgabenummer15 December
Frühes Online-Datum5 Sept. 2021
PublikationsstatusVeröffentlicht - 15 Dez. 2021

Bibliographische Notiz

Funding Information:
The financial support by the Austrian Federal Ministry for Digital and Economic Affairs and the National Foundation for Research, Technology and Development is gratefully acknowledged.

Publisher Copyright:
© 2021

Dieses zitieren