Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

Juergen Lackner; Wolfgang Waldhauser; R. Berghauser; Reinhold Ebner; M. Beutl; G. Jakopic; G. Leising; H. Hutter; M. Rosner; Thomas Schöberl

doi:10.1016/j.surfcoat.2004.04.080

Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

Titel in Übersetzung: Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

Juergen Lackner
, Wolfgang Waldhauser
, R. Berghauser
, Reinhold Ebner
, M. Beutl
, G. Jakopic
, G. Leising
, H. Hutter
, M. Rosner
, Thomas Schöberl

Lehrstuhl für Materialphysik (430)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

11 Zitate (Scopus)

Titel in Übersetzung	Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films
Originalsprache	Englisch
Seiten (von - bis)	225-230
Fachzeitschrift	Surface & coatings technology
Jahrgang	192
DOIs	https://doi.org/10.1016/j.surfcoat.2004.04.080
Publikationsstatus	Veröffentlicht - 2005

Zugriff auf Dokument

10.1016/j.surfcoat.2004.04.080

Dieses zitieren

Lackner, J., Waldhauser, W., Berghauser, R., Ebner, R., Beutl, M., Jakopic, G., Leising, G., Hutter, H., Rosner, M., & Schöberl, T. (2005). Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films. Surface & coatings technology, 192, 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080

@article{7144c205a39745779491840addf274ea,

title = "Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films",

author = "Juergen Lackner and Wolfgang Waldhauser and R. Berghauser and Reinhold Ebner and M. Beutl and G. Jakopic and G. Leising and H. Hutter and M. Rosner and Thomas Sch{\"o}berl",

year = "2005",

doi = "10.1016/j.surfcoat.2004.04.080",

language = "English",

volume = "192",

pages = "225--230",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

Lackner, J, Waldhauser, W, Berghauser, R, Ebner, R, Beutl, M, Jakopic, G, Leising, G, Hutter, H, Rosner, M & Schöberl, T 2005, 'Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films', Surface & coatings technology, Jg. 192, S. 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080

TY - JOUR

T1 - Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

AU - Lackner, Juergen

AU - Waldhauser, Wolfgang

AU - Berghauser, R.

AU - Ebner, Reinhold

AU - Beutl, M.

AU - Jakopic, G.

AU - Leising, G.

AU - Hutter, H.

AU - Rosner, M.

AU - Schöberl, Thomas

PY - 2005

Y1 - 2005

U2 - 10.1016/j.surfcoat.2004.04.080

DO - 10.1016/j.surfcoat.2004.04.080

M3 - Article

SN - 0257-8972

VL - 192

SP - 225

EP - 230

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -