Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design

Mehran Golizadeh Najafabadi, André Anders, Francisca Mendez Martin, Szilárd Kolozsvári, Robert Franz

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

5 Zitate (Scopus)

Abstract

Nowadays, multi-element cathodes are frequently employed to grow multi-element thin films and coatings using cathodic arc deposition processes. During cathode erosion, the cathode spot sequentially ignites on the cathode surface and imposes melting-solidification cycles that lead to material intermixing and the formation of a modified layer on the cathode surface. To allow us to study these surface modifications, a 10 μm thick Mo/Al multilayer coating was sputter-deposited onto a standard Ti arc cathode. This cathode was eroded by a dc steered arc discharge for a short duration enabling the observation of single craters formed by type 1 and 2 cathode spots. Furthermore, separated clusters of overlapping craters and a fully eroded surface caused by different stages of erosion were differentiated when scanning the erosion track in the lateral direction. Cross sections of single craters were prepared by focused ion beam techniques while metallographic methods were applied to obtain cross sections of overlapping craters and the modified layer. The layers of the multilayer coating acted as trace markers providing new insights into the material intermixing within craters, the material displacements during crater formation, the plasma pressure acting on the craters, and the temperature gradient (heat-affected zone) below the craters. The observations are discussed within the framework of established arc crater formation models.

OriginalspracheEnglisch
Aufsatznummer113301
Seitenumfang10
FachzeitschriftJournal of applied physics
Jahrgang127.2020
Ausgabenummer11
DOIs
PublikationsstatusElektronische Veröffentlichung vor Drucklegung. - 16 März 2020

Bibliographische Notiz

Funding Information:
Financial support by the Österreichische Forschungsförderungsgesellschaft mbH within the framework of the project “ArcCathodeErosion” (Project No. 856889) is highly acknowledged. The authors are thankful to Karl-Heinz Pichler for his help with the sputter deposition of the multilayer coating on the cathode. A.A. acknowledges support from the Leibniz Association (Project No. K128/2018) and by the Free State of Saxony and the European Regional Development Fund (Grant No. 100336119).

Publisher Copyright:
© 2020 Author(s).

Dieses zitieren