@article{01fdd3e40f904a938305452c761f934e,
title = "Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass",
keywords = "4-point bending, interface energy release rate, W(TI)/BPSG interface",
author = "B. V{\"o}lker and W. Heinz and K. Matoy and R. Roth and Batke, \{J. M.\} and T. Sch{\"o}berl and C. Scheu and G. Dehm",
year = "2015",
month = jun,
day = "23",
doi = "10.1080/14786435.2014.913108",
language = "English",
volume = "95",
pages = "1967--1981",
journal = "Philosophical magazine",
issn = "1478-6435",
publisher = "Taylor and Francis",
number = "16-18",
}