Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2013
Veranstaltung	60th International AVS Symposium and Exhibition - Dauer: 27 Okt. 2013 → …

Konferenz	60th International AVS Symposium and Exhibition
Zeitraum	27/10/13 → …

60th International AVS Symposium and Exhibition
Mühlbacher, M. (Redner/-in)
31 Okt. 2013
Aktivität: Teilnahme an oder Organisation einer Veranstaltung › Konferenzteilnahme

Dieses zitieren

@conference{06a698e232d84a838915c32dfd06f73d,

title = "Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT",

author = "Marlene M{\"u}hlbacher and \{Mendez Martin\}, Francisca and B. Sartory and Jozef Keckes and J. Lu and Hultman Lars and Christian Mitterer",

year = "2013",

language = "English",

note = "60th International AVS Symposium and Exhibition ; Conference date: 27-10-2013",

}

TY - CONF

T1 - Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Keckes, Jozef

AU - Lu, J.

AU - Lars, Hultman

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Presentation

T2 - 60th International AVS Symposium and Exhibition

Y2 - 27 October 2013

ER -