Interfacial Band Engineering of MoS2/Gold Interfaces Using Pyrimidine-Containing Self-Assembled Monolayers: Toward Contact-Resistance-Free Bottom-Contacts

Aleksandar Matkovic, Andreas Petritz, Gerburg Schider, Markus Krammer, Markus Kratzer, Esther Karner-Petritz, Alexander Fian, Herbert Gold, Michael Gärtner, Andreas Terfort, Christian Teichert, Egbert Zojer, Karin Zojer, Barbara Stadlober

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

6 Zitate (Scopus)

Abstract

Bottom-contact architectures with common electrode materials such as
gold are crucial for the integration of 2D semiconductors into existing
device concepts. The high contact resistance to gold—especially for bottom
contacts—is, however, a general problem in 2D semiconductor thin-film
transistors. Pyrimidine-containing self-assembled monolayers on gold
electrodes are investigated for tuning the electrode work functions in order
to minimize that contact resistance. Their frequently ignored asymmetric and
bias-dependent nature is recorded by Kelvin probe force microscopy through
a direct mapping of the potential drop across the channel during device
operation. A reduction of the contact resistances exceeding two orders of
magnitude is achieved via a suitable self-assembled monolayer, which vastly
improves the overall device performance.
OriginalspracheEnglisch
Aufsatznummer2000110
Seitenumfang6
FachzeitschriftAdvanced Electronic Materials
Jahrgang6
Ausgabenummer5
DOIs
PublikationsstatusVeröffentlicht - 18 März 2021

Bibliographische Notiz

Funding Information:
This work was supported financially by the Austrian Science Fund (FWF): I2081-N20 and I1788-N20 and by the German Research Foundation (Deutsche Forschungsgemeinschaft; DFG) via Grant No. TE247/15-1 (M.G. and A.T.). A.M. acknowledges the support through a Lise Meitner fellowship M2323-N36 and through I4323-N36 by the Austrian Science Fund (FWF). The authors acknowledge the support by Christine Prietl for mask production.

Publisher Copyright:
© 2020 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

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