Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique

Titel in Übersetzung: Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

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Titel in Übersetzung	Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
Originalsprache	Englisch
Seiten (von - bis)	1768-1776
Fachzeitschrift	Acta materialia
Jahrgang	57
Publikationsstatus	Veröffentlicht - 2009

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@article{05f88ce377454da99083a355ab9d9bac,

title = "Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique",

author = "S. Massl and W. Thomma and Jozef Keckes and Reinhard Pippan",

year = "2009",

language = "English",

volume = "57",

pages = "1768--1776",

journal = "Acta materialia",

issn = "1359-6454",

publisher = "Acta Materialia Inc",

}