Investigation on structure and properties of arc-evaporated HfAIN hard coatings

Titel in Übersetzung: Investigation on structure and properties of arc-evaporated HfAIN hard coatings

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Titel in Übersetzung	Investigation on structure and properties of arc-evaporated HfAIN hard coatings
Originalsprache	Englisch
Seiten (von - bis)	528-535
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Publikationsstatus	Veröffentlicht - 2010

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@article{f0dd464b6d40433f88c5be5e67ed00c6,

title = "Investigation on structure and properties of arc-evaporated HfAIN hard coatings",

author = "Robert Franz and Christian Mitterer and Markus Lechthaler and Conrad Polzer",

year = "2010",

language = "English",

pages = "528--535",

journal = "Journal of vacuum science \& technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}