Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

Robert Franz; Peter Polcik; A. Anders

doi:10.1109/TPS.2013.2254135

Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

Titel in Übersetzung: Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

Robert Franz, Peter Polcik, A. Anders

Lehrstuhl für Funktionale Werkstoffe und Werkstoffsysteme (425)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

17 Zitate (Scopus)

Titel in Übersetzung	Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen
Originalsprache	Englisch
Seiten (von - bis)	1929-1937
Fachzeitschrift	IEEE Transactions on Plasma Science
Jahrgang	41
DOIs	https://doi.org/10.1109/TPS.2013.2254135
Publikationsstatus	Veröffentlicht - 2013

Zugriff auf Dokument

10.1109/TPS.2013.2254135

Dieses zitieren

@article{e3739de57f9d45b6a332b2b5d02e675f,

title = "Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen",

author = "Robert Franz and Peter Polcik and A. Anders",

year = "2013",

doi = "10.1109/TPS.2013.2254135",

language = "English",

volume = "41",

pages = "1929--1937",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers",

}

TY - JOUR

T1 - Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, A.

PY - 2013

Y1 - 2013

U2 - 10.1109/TPS.2013.2254135

DO - 10.1109/TPS.2013.2254135

M3 - Article

SN - 0093-3813

VL - 41

SP - 1929

EP - 1937

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

ER -