Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films

Anna Maria Hofer-Roblyek, Karl-Heinz Pichler, Christian Linke, Robert Franz, Jörg Winkler, Christian Mitterer

Publikation: Konferenzbeitrag › Poster › Forschung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2018
Veranstaltung	ICMCTF - San Diego, USA / Vereinigte Staaten Dauer: 23 Apr. 2018 → 27 Apr. 2018

Dieses zitieren

@conference{bbdf566ac1f348cc9b9af0d855cf9242,

title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films",

author = "Hofer-Roblyek, {Anna Maria} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",

year = "2018",

language = "English",

note = "ICMCTF ; Conference date: 23-04-2018 Through 27-04-2018",

}