Local strength measurement technique for miniaturised silicon-based components

Marco Deluca; Martin Pletz; Mike Morianz; Johannes Stahr; Peter Supancic; Robert Danzer; Raul Bermejo

doi:10.1109/ESIME.2011.5765812

Local strength measurement technique for miniaturised silicon-based components

Marco Deluca, Martin Pletz, Mike Morianz, Johannes Stahr, Peter Supancic, Robert Danzer, Raul Bermejo

Lehrstuhl für Struktur- und Funktionskeramik (410)

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

4 Zitate (Scopus)

Originalsprache	Englisch
Titel	2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011
DOIs	https://doi.org/10.1109/ESIME.2011.5765812
Publikationsstatus	Veröffentlicht - 2011
Veranstaltung	2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011 - Linz, Österreich Dauer: 18 Apr. 2011 → 20 Apr. 2011

Konferenz

Konferenz	2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011
Land/Gebiet	Österreich
Ort	Linz
Zeitraum	18/04/11 → 20/04/11

Zugriff auf Dokument

10.1109/ESIME.2011.5765812

Andere Dateien und Links

Link to publication in Scopus

Dieses zitieren

Deluca, M., Pletz, M., Morianz, M., Stahr, J., Supancic, P., Danzer, R., & Bermejo, R. (2011). Local strength measurement technique for miniaturised silicon-based components. in 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011 Artikel 5765812 https://doi.org/10.1109/ESIME.2011.5765812

@inproceedings{91ee46a697f84b66b9b65e893d918ecd,

title = "Local strength measurement technique for miniaturised silicon-based components",

author = "Marco Deluca and Martin Pletz and Mike Morianz and Johannes Stahr and Peter Supancic and Robert Danzer and Raul Bermejo",

year = "2011",

doi = "10.1109/ESIME.2011.5765812",

language = "English",

isbn = "9781457701078",

booktitle = "2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011",

note = "2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011 ; Conference date: 18-04-2011 Through 20-04-2011",

}

Deluca, M, Pletz, M, Morianz, M, Stahr, J, Supancic, P , Danzer, R & Bermejo, R 2011, Local strength measurement technique for miniaturised silicon-based components. in 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011., 5765812, 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011, Linz, Österreich, 18/04/11. https://doi.org/10.1109/ESIME.2011.5765812

TY - GEN

T1 - Local strength measurement technique for miniaturised silicon-based components

AU - Deluca, Marco

AU - Pletz, Martin

AU - Morianz, Mike

AU - Stahr, Johannes

AU - Supancic, Peter

AU - Danzer, Robert

AU - Bermejo, Raul

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?scp=79957923627&partnerID=8YFLogxK

U2 - 10.1109/ESIME.2011.5765812

DO - 10.1109/ESIME.2011.5765812

M3 - Conference contribution

AN - SCOPUS:79957923627

SN - 9781457701078

BT - 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011

T2 - 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011

Y2 - 18 April 2011 through 20 April 2011

ER -