Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5

Titel in Übersetzung: Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

11 Zitate (Scopus)

Titel in Übersetzung	Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5
Originalsprache	Englisch
Seiten (von - bis)	335203-335210
Fachzeitschrift	Journal of physics / D, Applied physics
Jahrgang	46
DOIs	https://doi.org/10.1088/0022-3727/46/33/335203
Publikationsstatus	Veröffentlicht - 2013

Zugriff auf Dokument

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title = "Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5",

author = "Robert Hollerweger and David Holec and J. Paultisch and Richard Rachbauer and P. Polcik and P.H. Mayrhofer",

year = "2013",

doi = "10.1088/0022-3727/46/33/335203",

language = "English",

volume = "46",

pages = "335203--335210",

journal = "Journal of physics / D, Applied physics",

issn = "0022-3727",

publisher = "Institute of Physics",

}

TY - JOUR

T1 - Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5

AU - Hollerweger, Robert

AU - Holec, David

AU - Paultisch, J.

AU - Rachbauer, Richard

AU - Polcik, P.

AU - Mayrhofer, P.H.

PY - 2013

Y1 - 2013

U2 - 10.1088/0022-3727/46/33/335203

DO - 10.1088/0022-3727/46/33/335203

M3 - Article

SN - 0022-3727

VL - 46

SP - 335203

EP - 335210

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

ER -