Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

B. Völker; W. Heinz; K. Matoy; R. Roth; J. M. Batke; T. Schöberl; M. J. Cordill; G. Dehm

doi:10.1016/j.tsf.2015.03.047

Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

B. Völker, W. Heinz, K. Matoy, R. Roth, J. M. Batke, T. Schöberl, M. J. Cordill, G. Dehm

Lehrstuhl für Materialphysik (430)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

7 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	170-176
Seitenumfang	7
Fachzeitschrift	Thin solid films
Jahrgang	583
Ausgabenummer	1
DOIs	https://doi.org/10.1016/j.tsf.2015.03.047
Publikationsstatus	Veröffentlicht - 2015

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10.1016/j.tsf.2015.03.047

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@article{b7ba12d3fd4641cd874aa6ba9e444926,

title = "Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass",

keywords = "4-point-bending, Interface, Interface energy release rate, Ti enrichment at interface, W-based metallization",

author = "B. V{\"o}lker and W. Heinz and K. Matoy and R. Roth and Batke, {J. M.} and T. Sch{\"o}berl and Cordill, {M. J.} and G. Dehm",

year = "2015",

doi = "10.1016/j.tsf.2015.03.047",

language = "English",

volume = "583",

pages = "170--176",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

AU - Völker, B.

AU - Heinz, W.

AU - Matoy, K.

AU - Roth, R.

AU - Batke, J. M.

AU - Schöberl, T.

AU - Cordill, M. J.

AU - Dehm, G.

PY - 2015

Y1 - 2015

KW - 4-point-bending

KW - Interface

KW - Interface energy release rate

KW - Ti enrichment at interface

KW - W-based metallization

UR - http://www.scopus.com/inward/record.url?scp=84933050702&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2015.03.047

DO - 10.1016/j.tsf.2015.03.047

M3 - Article

AN - SCOPUS:84933050702

SN - 0040-6090

VL - 583

SP - 170

EP - 176

JO - Thin solid films

JF - Thin solid films

IS - 1

ER -