Mechanical properties of homogeneous and nitrogen graded TiN thin films

Felipe C Silva; Matheus A Tunes; Julio C Sagás; Luis C Fontana; Nelson B de Lima; Cláudio G Schön

doi:10.1016/j.tsf.2020.138268

Mechanical properties of homogeneous and nitrogen graded TiN thin films

Felipe C Silva, Matheus A Tunes, Julio C Sagás, Luis C Fontana, Nelson B de Lima, Cláudio G Schön

Lehrstuhl für Nichteisenmetallurgie (520)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

3 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	138268
Seiten (von - bis)	138268
Seitenumfang	1
Fachzeitschrift	Thin solid films
Jahrgang	710
DOIs	https://doi.org/10.1016/j.tsf.2020.138268
Publikationsstatus	Veröffentlicht - 30 Sept. 2020

Zugriff auf Dokument

10.1016/j.tsf.2020.138268

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Link to publication in Scopus

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@article{70841067006e42b2931b55ccaace095c,

title = "Mechanical properties of homogeneous and nitrogen graded TiN thin films",

keywords = "Ceramics, Characterization, Coatings, Fracture behavior, Stress measurements, X-ray analysis",

author = "Silva, {Felipe C} and Tunes, {Matheus A} and Sag{\'a}s, {Julio C} and Fontana, {Luis C} and {de Lima}, {Nelson B} and Sch{\"o}n, {Cl{\'a}udio G}",

year = "2020",

month = sep,

day = "30",

doi = "10.1016/j.tsf.2020.138268",

language = "English",

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pages = "138268",

journal = "Thin solid films",

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TY - JOUR

T1 - Mechanical properties of homogeneous and nitrogen graded TiN thin films

AU - Silva, Felipe C

AU - Tunes, Matheus A

AU - Sagás, Julio C

AU - Fontana, Luis C

AU - de Lima, Nelson B

AU - Schön, Cláudio G

PY - 2020/9/30

Y1 - 2020/9/30

KW - Ceramics

KW - Characterization

KW - Coatings

KW - Fracture behavior

KW - Stress measurements

KW - X-ray analysis

UR - http://www.scopus.com/inward/record.url?scp=85089210586&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2020.138268

DO - 10.1016/j.tsf.2020.138268

M3 - Article

SN - 0040-6090

VL - 710

SP - 138268

JO - Thin solid films

JF - Thin solid films

M1 - 138268

ER -